含氢水系统

Equipment HWG100/1 is used for the production of high purity DI water with controlled concentrations of dissolved hydrogen in the water. The device can be used in the production of semiconductors and displays for the cleaning of surfaces without the use of chemicals. Output line has a maximum flow rate of up to 100 liters per minute. We also offer dual units with two separate independently controlled hydrogen water units for use with multiple baths/equipment or for reaching higher flowrates.

Features and Benefits

- Designed for display production

-Eco-friendly alternative to chemicals

-Saves on chemicals and handling costs

-High flowrate with high concentrations

-Touch panel HMI interface

Configuration

-Hollow fiber membrane contactors

-Hydrogen water unit 100 slpm @ 1ppm

-PLC controller

-PFA high purity pneumatic operated valves

-Touchscreen LCD display